MEMS & Microfluidics LAB
Wet Etch Station
February 3, 2017
Sputter Coater
February 3, 2017MEMS & Microfluidics LAB
SATALAB’s MEMS & Microfluidics LAB System is an excellent multifunctional
coating, lithography and etching system for MEMS/NEMS or Microfluidics purposes.
| FEATURES | SPECIFICATIONS | |
|---|---|---|
| 1 | Body Material | Polyethylene |
| 2 | Fume Hood | for Hazardous Gases |
| 3 | Lithography Station | Refer to Mask Aligner Section |
| 4 | Embeded Spin Coater | Refer to Spin Coater Section |
| 5 | Anti-Acid Sink | to Lock Etchant |
| 6 | Desiccator & Syringe Pump | for Microfluidics Purposes |